18EC822 Micro Electro Mechanical Systems syllabus for EC

Overview of MEMS and Microsystems:

MEMS andMicrosystem, TypicalMEMS and Microsystems Products, Evolution of Microfabrication, Microsystems and Microelectronics, Multidisciplinary Nature of Microsystems, Miniaturization. Applications and Markets.

Working Principles of Microsystems:

Introduction, Microsensors, Microactuation, MEMS with Microactuators, Microaccelerometers, Microfluidics.

Engineering Science for Microsystems Design and Fabrication:

Introduction, Molecular Theory of Matter and Inter-molecular Forces, Plasma Physics, Electrochemistry.

Engineering Mechanics for Microsystems Design:

Introduction, Static Bending of Thin Plates, Mechanical Vibration, Thermo mechanics, Fracture Mechanics, Thin Film Mechanics, Overview on Finite Element Stress Analysis.

Scaling Laws in Miniaturization:

Introduction, Scalingin Geometry, Scaling in Rigid-Body Dynamics, Scaling in Electrostatic Forces, Scaling in Fluid Mechanics, Scaling in Heat Transfer.

Overview of Micromanufacturing:

Introduction, Bulk Micromanufacturing, Surface Micromachining, The LIGA Process, Summary on Micromanufacturing.

Course Outcomes:

After studying this course, students will be ableto:

1.Appreciate the technologies related to Micro Electro Mechanical Systems.

2. Understand design and fabrication processes involved with MEMS De- vices.

3.Analyze the MEMS devices and develop suitable mathematical models.

4. Know various application areas for MEMS device.

5. Describe the Micromanufacturing.

Question paper pattem:

• Examination will be conducted for 100 marks with question paper containing 10 full questions, each of 20 marks.
• Each full question can have a maximum of 4 sub questions.
• There will be 2 full questions from each module covering all the topics of the module.
• Students will have to answer 5 full questions, selecting one full question from each module.
• The total marks will be proportionally reduced to 60 marks as SEE marks is 60.

Text Book:

• Tai-Ran Hsu, MEMS and Micro systems: Design, Manufacture and Nanoscale Engineering, 2nd Ed, Wiley.

Reference Books:

1. Hans H. Gatzen,Volker Saile, JurgLeuthold, Micro and Nano Fabrication: Tools and Processes, Springer, 2015.

2. Dilip Kumar Bhattacharya, Brajesh Kumar Kaushik, Microelectromechanical Systems (MEMS), Cengage Learning.