Pressure Sensors:
Capacitive Pressure Sensors, Inductive Pressure Sensors, Ultrahigh Sensitivity Pressure Sensors.
Motion and Acceleration Sensors:
Ultrahigh Sensitivity, Wide Dynamic Range Sensors, Other Motion and Acceleration Microsensors.
Gas and Smoke Sensors:
A CO Gas Sensor Based on Nanotechnology, Smoke Detectors.
Moisture Sensors:
Structure, Theory, Main Experimental Results, Auxiliary Experimental Results.
Optoelectronic and Photonic Sensors:
Optoelectronic Microphone, Other Optoelectronic and Photonic Micro Sensors.
Biological, Chemical, and “Lab on a Chip” Sensors:
Lab on a Chip Sensors, Other Biochemical Micro- and Nano-Sensors.
Electric, Magnetic, and RF/Microwave Sensors:
Magnetic Field Sensors, Other Important Electromagnetic/RF Micro- and Nano-Sensors.
Integrated Sensor/Actuator Units and Special Purpose Sensors:
Aircraft Icing Detectors, Other Special Purpose Small-Scale Devices.
Course Outcomes:
At the end of the course the student will be able to:
Question paper pattern:
Textbook
1 Micro- and Nano-Scale Sensors and Transducers Ezzat G. Bakhoum CRC Press 2015